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    Friedrich-Alexander-Universität Chair of Electron Devices
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    • Research
      • Silicon Semiconductor Technology
        • Realisierung von Koppelkondensatoren für Betriebsspannungen über 1200V durch Integration von Parallelwiderständen
        • Hybrid polymer based Bragg grating sensors – Fundamental investigations and application
        • A Synergetic Training Network on Energy beam Processing: from Modelling to Industrial Applications
        • Atomic layer deposition of dopant source layers for semiconductor doping – Characterization and modelling of drive-in processes
      • Wide-Bandgap Devices
        • Untersuchungen zur Leistungsdichte und Effizienz eines isolierenden DC/DC-Wandlers in GaN-Technologie
        • Dynamic Characterization of Molded Devices and Fundamental Investigations on Reliability
        • Charge compensation in 4H silicon carbide – Simulation, modelling and experimental verification
        • SiC-BIFET: Untersuchungen zu bipolaren SiC-Feldeffekttransistoren für das Mittelspannungsnetz
        • Development of semiconductor sensors based on silicon carbide
        • Kristallzüchtung von Nitrid-Einkristallen mit hoher Reinheit
      • Anorganische Dünnschichtelektronik
        • GRK 1161: Disperse systems for electronic applications – subproject electron devices in a nano-crystalline matrix
        • Liquid-phase processing of silicon thin films and electron devices based on polysilane precursors
        • Thin-Film Transistors with Novel Architecture for RF Circuits and Systems
        • Engineering of Nanoelectronic Materials – B6 (Druckbare Elektronik)
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        • Herstellung und Charakterisierung von Heterostrukturen aus 2D Materialien
        • Entwicklung eines PDMS-basierten Mikrofluidiksystems
        • Erforschung der Oberflächenpräparation und der Rückgewinnung von Aluminiumnitrid-Substraten
        • Growth and stability of anisotropic nanoparticles in liquids
        • Leistungszentrum Elektroniksysteme (LZE), Teilprojekt 1: “Impedanzmessplatz für DC/DC-Wandler”
        • Leistungszentrum Elektroniksysteme (LZE), Teilprojekt 2: “Robuste Gestaltung induktiver Energieüberträger für bewegte Anwendungen”
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    1. Home
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    4. Development of semiconductor sensors based on silicon carbide

    Development of semiconductor sensors based on silicon carbide

    In page navigation: Research
    • Silicon Semiconductor Technology
    • Wide-Bandgap Devices
      • Untersuchungen zur Leistungsdichte und Effizienz eines isolierenden DC/DC-Wandlers in GaN-Technologie
      • Dynamic Characterization of Molded Devices and Fundamental Investigations on Reliability
      • Charge compensation in 4H silicon carbide - Simulation, modelling and experimental verification
      • SiC-BIFET: Untersuchungen zu bipolaren SiC-Feldeffekttransistoren für das Mittelspannungsnetz
      • Development of semiconductor sensors based on silicon carbide
      • Kristallzüchtung von Nitrid-Einkristallen mit hoher Reinheit
    • Anorganic Thin Film Electronics
    • Anorganische Dünnschichtelektronik
    • Quantum Technologies
    • Other Projects

    Development of semiconductor sensors based on silicon carbide

    Development of semiconductor sensors based on silicon carbide

    (Own Funds)

    Overall project:
    Project leader: Lothar Frey
    Project members: Christian Matthus
    Start date: 1. October 2014
    End date: 15. June 2018
    Acronym:
    Funding source:
    URL:

    Abstract

    Abstract (fachliche Beschreibung), intern - Englsich

    Publications

    • Burenkov A., Matthus C., Erlbacher T.:
      Optimization of 4H-SiC UV Photodiode Performance Using Numerical Process and Device Simulation
      In: IEEE Sensors Journal 16 (2016), p. 4246-4252
      ISSN: 1530-437X
      DOI: 10.1109/JSEN.2016.2539598
    • Matthus C., Erlbacher T., Burenkov A., Bauer A., Frey L.:
      Ion implanted 4H-SiC UV pin-diodes for solar radiation detection – Simulation and characterization
      In: Materials Science Forum 858 (2016), p. 1032-1035
      ISSN: 0255-5476
      DOI: 10.4028/www.scientific.net/MSF.858.1032
    • Matthus C., Burenkov A., Erlbacher T.:
      Optimization of 4H-SiC photodiodes as selective UV sensors
      In: Materials Science Forum (2017), p. 622-625
      ISSN: 0255-5476
      DOI: 10.4028/www.scientific.net/MSF.897.622
    • Matthus C., Erlbacher T., Schöfer B., Bauer A., Frey L.:
      Implementation of 4H-SiC PiN-diodes as nearly linear temperature sensors up to 800 K towards SiC multi-sensor integration
      In: Materials Science Forum (2017), p. 618-621
      ISSN: 0255-5476
      DOI: 10.4028/www.scientific.net/MSF.897.618

    Chair of Electron Devices
    FAU Erlangen-Nürnberg

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