Research

The Chair of Electron Devices (LEB) has been engaged in applied research in the fields of technology and manufacturing of electron devices for 30 years. Until a few years ago, the development, characterization, and simulation of single processes as well as the investigation of materials for micro and nanoelectronics on the semiconductor material silicon were the main focus of activities. In recent years, the focus of research in silicon technology has shifted towards the development and process integration of devices. In particular, the focus is now on devices with wide-bandgap and inorganic thin-film electronics. A further research focus was set with the development of applied quantum technologies.